Maskless lithography application in microfluidics
Microfluidics is the science and technology of manipulating small volumes of fluids—typically in the microliter or nanoliter range—through channels with dimensions of tens to hundreds of micrometers. It plays a central role in modern biomedical research, diagnostics, and chemical analysis, enabling precise control over reactions and sample handling in compact lab-on-a-chip devices.
TuoTuo Technology (Singapore) Pte. Ltd. has advanced this field through its Maskless UV Lithography Systems, which combine Digital Micromirror Device (DMD) projection and high-resolution optical modules to create microstructures directly on photoresist surfaces. This digital, mask-free process eliminates the need for traditional photomasks, allowing faster prototyping, greater design flexibility, and sub-micron patterning accuracy—key advantages for microfluidic device fabrication.
According to TuoTuo’s technical brochure, their maskless lithography machines can fabricate high-aspect-ratio microstructures (10:1), offering the precision and flexibility required for the manufacture of microfluidic chips. These chips are widely used in single-cell analysis, biosensing, and environmental diagnostics. The system’s real-time autofocus, accurate overlay alignment, and array lithography capabilities ensure consistent exposure and rapid process validation during chip development.
The UV Litho series—including the UV Litho-ACA and UV Litho-S—is optimized for both research and production. Its ability to produce fine, repeatable microchannel patterns on substrates supports complex microfluidic architectures that integrate optical sensors, flow control, and biochemical reaction zones.
No physical masks required — ideal for custom or iterative designs.
Grayscale lithography (up to 4096 levels) — enables smooth channel depth transitions for advanced fluid control.
High aspect ratio precision — critical for ensuring consistent flow and minimizing capillary effects.
Rapid iteration — reduces prototyping time from days to hours.
TuoTuo Technology’s maskless lithography systems provide an advanced manufacturing solution for the next generation of microfluidic devices, merging high precision, speed, and design agility. Their technology empowers researchers and manufacturers to create intricate microchannel structures that push the boundaries of lab-on-a-chip innovation.